CHBE6229 [at Georgia Tech]

Intro to MEMS, 3 credit hours — Introduction to Micro-Electro-Mechanical Systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators.

No prereqs

Taught by:

Woonhong Yeo (from CIOS): 6 hours per week on average; 7.2 in Fall 2023; 5 in Fall 2021; 2 in Fall 2020.

Main sections

CHBE6229A

Linked sections

Highlight all
A01
A02
A03

Taught by Woonhong Yeo. CRN is 87288, [view on OSCAR].

Meetings

3:30PM-4:20PM in Bunger-Henry room 380 every Monday, Wednesday

Other sections

CHBE6229A01

Linked sections

Taught by Woonhong Yeo. CRN is 83067, [view on OSCAR].

Meetings

8:00AM-10:45AM in J. Erskine Love Manufacturing room 312 every Wednesday

CHBE6229A02

Linked sections

Taught by Woonhong Yeo. CRN is 83068, [view on OSCAR].

Meetings

8:00AM-10:45AM in J. Erskine Love Manufacturing room 312 every Thursday

CHBE6229A03

Linked sections

Taught by Woonhong Yeo. CRN is 83069, [view on OSCAR].

Meetings

8:00AM-10:45AM in J. Erskine Love Manufacturing room 312 every Friday