ECE6229A
Linked sections
Taught by Woonhong Yeo. CRN is 87230, [view on OSCAR].
Meetings
- 3:30PM-4:20PM in Bunger-Henry room 380 every Monday, Wednesday
Introduction to MEMS, 3 credit hours — Introduction to Micro-Electro-Mechanical systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators. Credit not allowed for both ECE 6229 and ME 6229 or CHBE 6229.
No prereqs
Taught by:
Taught by Woonhong Yeo. CRN is 87230, [view on OSCAR].
Taught by Woonhong Yeo. CRN is 83056, [view on OSCAR].
Taught by Woonhong Yeo. CRN is 83057, [view on OSCAR].
Taught by Woonhong Yeo. CRN is 83058, [view on OSCAR].